Microsoft Word - MSM 2000 final 3.rtf

نویسنده

  • Andreas Hieke
چکیده

A fundamental problem of all FEM capacitance computations in MEMS and ULSI is to determine proper mesh size for the elements representing the considered model. In particular, optimal mesh size selection is crucial for large 3D models to limit the required computational effort. However, automatic mesh refining algorithms are not applicable and/or desirable in all cases. Five mesh distributions/densities for the same 6f2 DRAM cell model have been evaluated with respect to accuracy and CPU time using the APDL macro CAMACO for ANSYS.

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تاریخ انتشار 1999